7000 Critical Esd Process Monitor1

Novx 7000

Field Sensing
Input Voltage ±15 – ±5000V
Output Voltage 0 – ±5.0
Accuracy ±1V for <20V; ±5% for >20V
ESD Event Detection
 CDM / HBM
Particle Counter Interface
 Data Acquisition
Body Voltage Detection
Applied Voltage <0.5V
Accuracy ±0.5V
GND Monitoring
Range 1-20 ohms
Applied Voltage <0.5V
Accuracy 0.5 ohms
General
Dimension 2.7W x 7H x 5.5D in. (6.9 x 17.8 x 14 cm)
Weight 2.5 lb (1.4 kg)
Category:

Monitoring Critical Electrostatic Parameters in Workstations & Process Environments

The Novx Series 7000 Process Monitoring System is a multi-purpose microprocessor-based instrument for monitoring critical electrostatic related parameters in workstation and process environments. The six dedicated channels customize the instrument for the monitoring field voltage detection/ionizer balance, ESD event, body voltage detection or ground monitoring and particle counting.

  • Smart Signal Processing
  • Multiple sensor and antenna styles
  • Daisy chainable; RS-485 or Ethernet output
  • ESD event detection tracking
  • Three options for field voltage monitoring
  • User-programmable alarm set-points with automated messaging
  • Closed-loop control to tool computer
  • Plug-in modules allow factory upgrades

Download Datasheet

 Novx 7000

Related products