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AeroBar® 5225 In-tool Ionizing System
| AeroBar 5225 | |
|---|---|
| Input Voltage | 24 VAC, 50/60 Hz, 1W (typ), received from the Interface Module |
| Ion Emission | Pulsed DC, Steady-state DC or standby |
| Emitter Points | Single-crystal Silicon, replaceable |
| Cleanliness | ISO 14644-1 Class 1 |
| Dimension | 2.1H x 1.2W x 22.4, 28.4, 35.7, 44.4, 55.6, 64.4, 75.5, or 84.4L in. (5.3H x 3.1W x 56.9, 72.1, 90.7, 112.8, 141.2, 163.6, 191.8, or 214.4 L cm) |
| Weight | 1.5 lb (1.02 kg) for a 22 in (56.9 cm) bar (approx. 6 oz per additional ft/0.17 kg per additional 30 cm) |
| Interface Module Model 5200-IM6T |
|
| Input Voltage | 24 VDC, 1.0A, ±5% |
| Capacity | Connect to up to six Model 5225 AeroBars |
| Indicators | Green POWER ON, yellow COMMUNICATION, red ALARM |
| Dimension | 2.9H x 2.8W x 12.4L in. (7.4H x 7.1W x 31.5L cm) |
| Weight | 4 lb (2 kg) |
Cleanroom Compatible for High Ion Output for Fast Neutralization
Simco-Ion’s Model 5225 Digital AeroBar with Software Control is designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, E78 compliance at the most stringent levels can be achieved.
- Complete integration with tool control system
- Fully adjustable parameters for each AeroBar
- Ion current monitoring
- Several lengths available including 3 specifically designed for EFEMs
- Single-crystal silicon emitter points
Interface Module Model 5200-IM6T
Powers and supports up to 6 AeroBar Model 5225 Ionizers, FMS output.
